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Agilent 5529A Dynamic Calibrator
Data Sheet
System Specifications
Environmental Operating Temperature: 0 - 40C (32 - 104F) Optics temperature must be stabilized to 2C to achieve accuracy specifications. Power Requirements Laser Head: 100 - 120 Vac, 48 - 66 Hz, and 400 Hz 220 - 240 Vac, 48 - 66 Hz 50 W (during warmup) 33 W (after warmup) Electronics (from PC): 2.6 A at 5 Vdc,15 mA at 12 Vdc Sample Rate Depends on computer type and setup. Typical rates are listed below. Computer Typical rate 486/33 6.7 kHz 486/66 12 kHz Pentium 90 33 kHz1
1. Start Timer: invoked from computer (not from remote).
Laser Characteristics Type: Helium-Neon with automatically tuned Zeeman-split two-frequency output Warm-up Time: Less than 10 minutes (4 minutes typical) Vacuum Wavelength: 632.991354 nm Wavelength Accuracy: 0.1 ppm (0.02 ppm of measured wavelength if calibrated with factory calibration, Option UK6) Short Term (1 hour) Wavelength Stability: 0.002 ppm typical Long Term (Lifetime) Wavelength Stability: 0.02 ppm typical Output Power: 180 W (<1 mW per Class 11 Laser Product) Beam Diameter: 6 mm (0.24 in) Beam Centerline Spacing: 11.0 mm (0.44 in) (input to output aperture) Safety Classification: Class II Laser Product conforming to U.S. National Center for Devices and Radiological Health Regulations 21CFR 1040.10 and 1040.11.
CAUTION
LASER LIGHT
DO NOT STARE INTO BEAM MAXIMUM OUTPUT: 1mw PULSE SPEC: continuous wave LASER MEDIUM: helium neon CLASS I I LASER PRODUCT
Linear Distance, Diagonal, and Velocity Measurement Specifications
X Y
Angular Measurement Specifications
Y
X
Measurement Range Up to 40 m (130 ft) with Linear Optics; Up to 80 m (260 ft) with Long Range Option Linear Distance and Diagonal Measurement Accuracy
Temperature Range, C [F] 20 0.5 15 - 25 [59 - 77] 0 - 40 [32 - 104] 10751C/D Air Sensor 1.5 ppm 1.7 ppm 3.0 ppm* In Vacuum 0.1 (0.02) ppm 0.1 (0.02) ppm 0.1 (0.02) ppm
Angle Measurement Accuracy 0.2% of displayed value 0.05 arc-seconds per meter of distance traveled by the linearly moving optic. Measurement Type Pitch and yaw Angle Measurement Resolution 0.05 arc-seconds (standard) 0.005 arc-seconds (extended) Measurement Range 10 (rotated about base of optic) 20 (rotated about center of optic) Maximum Distance Between Laser Head and Reflector Up to 15 m (50 ft)
* Typical accuracy is 1.0 ppm with 5 month calibration cycle on Air Sensor.
Vacuum accuracy is 0.02 ppm if the laser head is calibrated to MIL-STD 45662A.
Velocity Measurement Accuracy
Sample Rate (Hz) 10 mm/s [0.015 + ---------------- x ( -------- +1)]% of displayed value 10 kHz Velocity
Linear Distance and Diagonal Measurement Performance
Maximum Axis Velocity Optics Linear Optics (10766A) Plane Mirror Optics (10706A/B)* High Resolution Plane Mirror Optics (10716A)* Standard Extended Resolution Resolution 10 nm (0.4 in) 5 nm (0.2 in) 1 nm (0.04 in) 0.5 nm (0.02 in) 5519A 0.7 m/s (28 in/s) 0.35 m/s (14 in/s) 5519B 1 nm/s (40 in/s) 0.5 m/s (20 in/s)
2.5 nm (0.1 in)
0.25 nm (0.01 in)
0.18 m/s (7 in/s)
0.25 m/s (10 in/s)
* Requires the 10724A Plane Mirror Reflector. Since alignment of these optics
is much more sensitive than for linear optics, linear optics are recommended for general use. Aperture distance of 10716A is 12.7 mm, whereas 5519A is 160 mm.
2
Angular Position Measurement Specifications
Measurement Type Rotary and indexing tables or spindles
Flatness Measurement Resolution (per step)
270 0 180
Footspacing Dimension 50.8 mm (2 in) 101.6 mm (4 in) 152.4 mm (6 in)
Resolution 0.03 micron (1.0 in) 0.05 micron (2.0 in) 0.08 micron (3.0 in)
90
Indexing Mode (This is a zero-reference measurement using the 55290A Angular Position Measurement Kit.) Accuracy: 0.5 sec band +0.2% of displayed reading Step Size (resolution): 1 Range: multiple rotations or partial arcs Laser Measurement Mode Accuracy: 0.2% of displayed reading. Accuracy can be improved to 0.5 sec by calibrating laser optics with the indexing table (55290A). Range: 10 Setup Requirements Travel (using +2 mm, -1 mm machine axis, or manual from zero reference) Indexing Mode (Interferometer in fixture) Maximum Lift: 15 mm (2 mm required for fixture)
Reference Plane Accuracy The uncertainty of a surface plate flatness measurement is bounded by two parallel planes separated by the values below: Metric Units Mode: 0.03 M2 m English Units Mode: 0.12 F2 in Where: M = length of the surface diagonal in meters F = length of the surface diagonal in feet Lateral Offset and Flatness Range The combination of lateral offset and maximum flatness deviation must not displace the reflector more than 1.0 mm from the beam path in any direction. Way Straightness Accuracy 0.2% of displayed value 0.05 arc seconds per meter of distance traveled by the moving optics
E
Flatness and Way Straightness Measurement Specifications
A H G B F C D
Note: Values do not include effects of surface cleanliness or operator positioning repeatability. Range: up to 15 m (50 ft) Flatness Measurement Accuracy 0.2% of displayed value 0.05 arc-seconds per meter of distance traveled by the moving optic
Straightness and Parallelism Measurement Specifications
Y
X
X
Straightness Measurement Accuracy1 Overall Accuracy = Optical Reference Accuracy + Measurement Accuracy
1. This is analogous to the traditional straightedge and indicator method of measuring straightness, where Optical Reference Accuracy corresponds to the straightedge accuracy, and Measurement Accuracy corresponds to the indicator accuracy.
3
Optical Reference Accuracy Optical reference inaccuracy can be eliminated by using straightedge (mirror) reversal techniques. Short Range Optics: Metric units mode: 0.15 M2 m English units mode: 0.5 F2 in Long Range Optics: Metric units mode: 0.015 M2 m English units mode: 0.05 F2 in Where: M = distance of travel of the moving optic in meters F = distance of travel of the moving optic in feet Measurement Accuracy* Short Range Optics:
Displayed Value Temperature Range 15 - 25C 0 - 10 m (0 - 400 in) 3.5% 10 - 1,500 m (400 - 60, 000 in) 1% 0.25 m (10 in) 1% 0.5 m (20 in)
Straightness Measurement Range (Orthogonal to Axial Travel) 1.5 mm (0.060 in) Axial Separation (Travel) (distance between the interferometer and the reflector, typical, with proper alignment, 15 - 25C): Short Range Optics: 0.1 - 3 m (4 - 120 in) Long Range Optics: 1 - 30 m (3 - 100 ft)
Squareness Measurement Specifications
Y
X
Squareness Measurement Accuracy Short Range Optics: Metric Units Mode: (1.0 + 0.1 M) arc-seconds 0.01 English Unit Mode: (1.0 + 0.03 F) arc-seconds 0.01 Long Range Optics: Metric Units Mode: (1.0 + 0.01 M) arc-seconds 0.025 English Units Mode: (1.0 + 0.003 F) arc-seconds +0.025 Where: = calculated out-of-square angle in arc-seconds M = distance of travel of the moving optic in meters F = distance of travel of the moving optic in feet
0 - 40C
6%
Long Range Optics:
Displayed Value Temperature Range 15 - 25C 0 - 100 m (0 - 4,000 in) 5% 100 - 1,500 m (4,000 - 60,000 in) 2.5% 2.5 m (100 in) 2.5% 5 m (200 in)
A-Quad-B Input
Differential Input Threshold 0.5 V minimum 7.0 V maximum Differential Input Impedance 100 or High-Z Input Rate >100 ns edge-to-edge, or <10 MHz information rate Example: At maximum speed, A and B both must be <2.5 MHz.
* These specs are not applicable to Timebase Straightness Measurements.
0 - 40C
7.5%
Straightness* Measurement Resolution
5519A 5519B Short Range 0.01 m (0.4 in) 0.1 m (4 in) 5518A 0.04 m (1.4 in) (36 m) (14 in)
Long Range
4
Environmental Compensation
Maximum Compensation Update Rate 0.5 Hz (combined WOL and material temperature compensation) Wavelength of Light (WOL) Compensation, 10751C/D Manual: Compensation factor is entered via keyboard Range: 0.1 to 1.0 ppm Automatic: Requires 10751C/D Air Sensor. Display of pressure, temperature, relative humidity setting, and computed WOL are provided on the display. Cable Lengths: 10751C--5 m (16 ft) 10751D--15 m (49 ft) Operating Range Temperature: 0 - 40C (32 - 104F) Absolute Pressure: 517.2 - 775.7 mmHg (10 - 15 psia) Heat Dissipation: 2 W typical Time Constants: Temperature: 3 min. typical Pressure: <1s typical
Material Temperature Compensation, 10757D/E/F Manual: User-entered via keyboard Range: 0 - 50C (32 - 122F) Automatic: Requires 1 to 3 Agilent 10757D/E/F Material Temperature Sensors. Display of individual readings and average of all connected sensors are provided on display. 10757D/E/F Material Temperature Sensor: Integrated Circuit type. Mounted in remote, oil immersible "button" with magnetic base. Cable Lengths: 10757D--5 m (16 ft) 10757E--15 m (49 ft) 10757E--25 m (82 ft) Maximum Sensor Error (12 month calibration intervals) 0.35C, 0.10C with calibration matching to Agilent 10886A. Time Constant: 15 s typical Material Expansion Coefficient: Range: -100.0 to +100.0 ppm per C or F, manually entered.
Personal Computer
The Agilent 5529A requires an IBM PC-compatible computer with the following minimum configuration: * 486/33 MHz processor * 8 MB RAM * 112 ISA slots * 312" floppy disk drive * Windows(R) 3.1 and/or Windows 95 A faster, more powerful computer enhances 5529A operation.
5
System Component Dimensions and Weights
Power requirements: Included: one switching mode power supply input 100-240V, 47-63Hz,1A Environmental: Operating Range: 0-40C Minimum Requirements: IBM compatible Computer with Windows 98 or Windows 2000 Installed * 64Mb of RAM * CD-ROM Drive * USB version 1.1, 12Mb/sec internal port note: add on adapters are not supported Dedicated Host for Agilent 10887A PC Calibrator Board and 10886A PC Compensation Board Only!! Shipping Weight: 2.1 Kgs For more information on USB, visit http://www.usb.org/index.html.
Agilent 55292A USB Expansion Module
Head/Tripod
168.0 mm 192.0 mm (6.61 in) (7.56 in) 360.0 mm (14.17 in) M8 x 1.25 thread (3 places) 118.0 mm (4.65 in)
CrossAdjustable Slide 686 mm (27 in) Minimum 1650 mm (65 in) Maximum
92.7 mm (3.65 in) 508 mm
479.0 mm (18.86 in) Net Wt: 5.5 kg (12 lb)
44.0 mm (1.73 in) 55.0 mm (2.17 in)
Net Wt.: 17.6 lbs
692 mm (27.25 in) Max. Radius 330 mm Min. (13.0 in)
Agilent 5519A/B Laser Head
Agilent 10753B laser Tripod
6
Linear Optics
Captive Screw (2 Places) 40.0 mm (1.57 in) M3 x 0.5 (4 Places) Net Wt: 224 g (0.5 lb) 40.0 mm (1.57 in) Aperture Dia 20.0 mm (0.79 in)
Angular Optics
M3 x 0.5 (24 Places)
AN
GU
LAR
INTER FE
RO
30.0 mm (1.18 in)
40.0 mm (1.57 in)
ER MET
10770A
1A0101
40.0 mm (1.57 in)
25.0 mm (0.98 in)
30.0 mm (1.18 in)
72.6 mm (2.86 in) 30.0 mm (1.18 in) Aperture Dia 18.0 mm (0.71 in) (4 Places)
Agilent 10767A Linear Retroreflector
M10 x 1.5
90.0 mm (3.54 in) 50.0 mm (1.97 in)
30.0 mm (1.18 in) Net Wt: 553 g (1.3 lb)
30.0 mm (1.18 in)
30.0 mm (1.18 in)
Top
Agilent 10770A Angular Interferometer
Captive Screw (2 Places) 19.0 mm (0.75 in) 11.7 mm (0.46 in)
1077 1A
M3 x 0.5 (4 Places)
107.8 mm (4.24 in)
M3 x 0.5 (19 Places)
AR RE GUL FL AN
EC
TO
R
1A0101
M10 x 1.5
Front
Side
40.0 mm (1.57 in)
40.0 mm (1.57 in)
Agilent 10785A Height Adjuster/Post, 10784A Base
32.61 mm (1.284 in) 72.6 mm (2.86 in) 30.0 mm (1.18 in)
M3 x 0.5 (24 Places) 30.0 mm (1.18 in)
L
E IN
AR
INTERF ER
40.0 mm (1.57 in)
27.0 mm (1.06 in) 30.0 mm (1.18 in) 40.0 mm (1.57 in)
10766A
30.0 mm (1.18 in)
OM
ETER
Net Wt: 650 g (1.5 lb)
30.0 mm (1.18 in) 65.0 mm (2.56 in) Net Wt: 5.36 g (1.2 lb) Note Dotted outline shows possible 10767A retroreflector mounting positions.
Agilent 10771A Angular Reflector
Agilent 10766A/10767A Interferometer Combination
7
Flatness Accessories
63.5 mm (2.50 in) 50.8 mm (2.00 in) 152.5 mm (6.00 in) 1.65 mm (6.50 in) 114.3 mm (4.50 in) 101.6 mm (4.00 in) Pattern to Match 10771A (M3 x 0.5) Clearance Holes
50.0 mm (1.97 in) 39.0 mm (1.53 in) 50.0 mm (1.97 in) Net Wt: 661 g (1.5 lb)
50.0 mm (1.97 in)
12.7 mm (0.50 in)
Agilent 10759A Foot Spacing Kit
30.0 mm (1.18 in) 50.0 mm (1.97 in)
To Match 10770A Clears M3 x 0.5
30.0 mm (1.18 in) 110.0 mm (4.33 in)
Mirror Turns
12.2 mm (0.48 in)
45.7 mm (1.80 in)
Net Wt: 661 g (1.5 lb)
Agilent 10773A Flatness Mirror
8
Straightness/Squareness Optics
30.0 mm (1.18 in) 40.0 mm 30.0 mm (1.57 in) (1.18 in) 40.0 mm (1.57 in) Aperture Dia 20.0 mm (0.79 in) (2 Places) Captive Screw (2 Places) Net Wt: 510 g (1.2 lb) w/Mount
M3 x 0.5 (4 Places)
40.0 mm (1.57 in)
Agilent 10772A Tuning Mirror
30.0 mm (1.18 in) 30.0 mm (1.18 in)
40.0 mm (1.57)
32.0 mm (1.26 in) 32.0 mm (1.26 in) Aperture Dia 7.9 mm (0.31 in)
1077 5A
AN
GULAR REF
M3 x 0.5 (16 Places)
L
25.0 mm (0.98 in) 110.0 mm (4.33 in) Aperture Dia 8.0 x 98.0 mm (0.31 x 3.66 in)
40.0 mm (1.57 in)
M3 x 0.5 (2 Places) 21.0 mm (0.83 in)
EC
TO
R
1A0101
20.0 mm (0.79 in)
Net Weight: 800 g (28.2 oz) Angular Reflector
Net Weight: 164 g (5.8 oz) Straightness Interferometer
Agilent 10774A Short Range Straightness Optics/10775A Long Range Straightness Optics
90.0 mm (3.54) 36.0 mm (1.42) 18.0 mm (0.71) 51.0 mm (2.01) 25.5 mm (1.00) 11.0 Dia C'Sink Tap M10 x 1.5 (6H) Thru 55.0 mm (2.17) 38.0 mm (1.50) 19.1 Dia Thru (.75 Dia)
Aperture Dia 63.5 mm (2.5 in) 76.2 mm (3.00 in) Clears M3 x 0.5 (2 Places) Net Wt: 374 g (0.82 lb) M10 x 1.5 99.1 mm (3.90 in)
86.2 mm (3.39 in)
M10 x 1.5
Agilent 10776-67001 Straightness Retroreflector
11.7 mm (0.46 in)
Agilent 10776A Straightness Mount
9
Straightness/Squareness Optics, continued
M10 x 1.5 (4 Places) 49.5 mm (1.95 in) 49.5 mm (1.95 in) 145.0 mm (5.71 in)
OPTICAL SQUARE 10777A
139.6 mm (5.50)
8.0 mm (0.31 in) (2 Places)
20.0 mm (0.79)
9.5 mm (0.37) 27.5 mm (1.08) 29.3 mm (1.15)
75.5 mm (1.26)
32.0 mm (1.26)
15.0 mm (0.59) 25
133.5 mm (5.26)
49.5 mm (1.95 in)
71.0 mm (2.80 in) (2 Places) 14.0 mm (0.55 in) (2 Places)
154.0 mm (6.06)
15.0 mm (0.59)
34
28.0 mm (1.10 in) (2 Places) 50.9 mm (2.01 in) 145.0 mm (5.71 in) 43.0 mm (1.69 in)
36.5 mm (1.44)
Net Wt: 4.0 kg (8.9 lb) w/Mount
20.0 mm (0.70)
20.0 mm (0.70) 32.0 mm (1.26) 77.0 mm (3.03)
12.0 mm (0.47)
20.0 mm (0.70)
Agilent 10777A Optical Square
67.0 mm (2.64)
59.5 mm (2.34)
4 x R5
20.0 mm (0.70)
Agilent 10777-20007 Optical Square Base
0 150.0 mm (5.91 in) 110.0 mm (4.33 in) (4 Places) 1/4-20 UNC 2B English Thread (2 Places) Chamfer 45 x 0.5 Both sides of Part
10.0 mm (0.39 in)
10.0 mm (0.39 in)
48.0 mm (1.89 in)
48.0 mm (1.89 in)
4.7 mm (0.19 in)
0 35.0 mm (1.38 in) M5 x 0.8 6H Thru (2 Places)
14.5 mm (0.57 in) 55.5 mm (2.19 in)
70.0 mm (2.76 in) 2Places 90.0 mm (3.54 in)
65.3 mm (2.57 in)
10.4 mm (0.41 in) (4 Places)
10.0 mm (0.39 in)
29.3 mm (1.15 in) 65.0 mm (2.56 in) 100.7 mm (3.96 in) 130.0 mm (5.12 in)
10.8 Thru C-Sink 90 x 11.8 Both Sides (2 Places) M10 x 1.5 6H Thru (7 Places)
10.0 mm (0.39 in)
Agilent 10768-20214 Base - Large
10
40.00 mm (1.57 in) 5.0 mm (0.20 in) 20.0 mm (0.79 in) mm (0.20 in) 30.0 mm (1.18 in)
30.0 mm (1.18 in) f 3.3 mm Thru C'Bore 6.5 mm f x 3.8 DP 25.70 (4 Places) (1.01 in) 20.0 mm (0.79 in) 40.00 mm (1.57 in) 62.4 mm (2.46 in)
M10 x 1.5 mm Thru (2 Places) 20.0 mm (0.79 in) 98.0 mm (3.86 in) 108.6 mm (4.28 in)
58.0 mm (2.28 in)
26.4 mm (1.04 in)
48.0 mm (1.89 in)
8.0 mm (0.31 in) 17.7 mm (0.70 in)
From Agilent 10768A/10769A Measurement Kit
Agilent 10769B Turning Mirror (Base Block Only)
Agilent 55290A Angular Position Measurement Kit
.25 SOC HD CAP SCR equally spaced on 6.125 B.C. (3 Places) 10-32 x .34 DP equally spaced on 1.750, 2.750 & 4.750 B.C. (24 Places)
16.00 mm (0.63 in) 4.90 mm (0.19 in) 43.20 mm 32.00 mm (1.70 in) (1.26 in) 90.4 mm (3.56 in) 82.49 mm (3.25 in) 98.3 mm (3.87 in) 41.24 mm (1.62 in) 6.00 mm (0.24 in) 31.20 mm (1.23 in)
69.85 mm TYP TO FLAT (2.75 in)
R 3.38
103.78 mm (4.09 in) 66.43 mm (2.62 in) 52.21 mm (2.06 in)
35.46 mm (1.40 in) 7.92 mm (0.31 in)
139.70 mm (5.50 in) 54.15 mm (2.25 in)
Rotary Indexing Table
9.11 mm (0.36 in)
Fixture, Angle Position Measurement
50.80 mm x 1.3 mm deep (2.00 in x 0.05 in)
4 x 1/4-20 UNC thru equally spaced 90 apart
171.5 mm (6.75 in)
38.10 mm (1.50 in)
73.0 mm (2.87 in) 8.6 mm (0.34 in) thru 9.505 mm (0.37 in) press fit for item 2 6.4 mm (0.25 in)
63.5 mm (2.50 in)
171.5 mm (6.75 in)
73.0 mm (2.87 in)
Adapter Plate
Flanged Shaft
11
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Product specifications and descriptions in this document subject to change without notice. Copyright (c) 1997, 2001 Agilent Technologies Printed in U.S.A. March 16, 2001 5964-9307E
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